Safely transfer with the new design and efficiently inspect Ultra-Thin Wafers. Olympus succeeds in transfer of down to 90 micron thick wafer in 200mm diameter with full cassette. Detail
AL110
Wafer Auto Loader
AL110
This model is a wafer loader which contributes to improvement in yield and productivity of 200mm or smaller wafers. MX61(8")/MX51(6") combination maximize efficiency of wafer inspection. Detail
The MX61A has further advanced automation and motorization of microscopic observations with the wafer support up to 300 mm. The AF Function, newly developed multi-spot sensor has enabled a substantial increase Autofocus stability. Detail
MX61L
Semiconductor / FPD Inspection Microscope (300mm)
MX61L
The Clean Class 1 conformity, numerous features to exclude dust. All driving components are housed in a shielded structure and are made of materials that offer excellent abrasion resistance and conformity with Clean Class 1. MX61L is capable of accommodating up to 300 mm wafers. Detail
MX61
Semiconductor/FPD Inspection Microscope (200mm)
MX61
The Clean Class 1 conformity, numerous features to exclude dust. All driving components are housed in a shielded structure and are made of materials that offer excellent abrasion resistance and conformity with Clean Class 1. MX61 is capable of accommodating up to 200 mm wafers. Detail