| Large-size Measuring Microscope |
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| STM6-LM |
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| The measuring area is 250mm x 150mm with motorized in Z-axis. STM6LM accept observation Brightfield/ Darkfield/ Simple Polarized/ Nomarski DIC. Option : Auto Focus. Detail |
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| Measuring Microscope |
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| STM6 |
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| The measuring area is 50mm x 50mm, 100mm x 50mm, 100mm x 100mm and 150mm x 100mm. STM6LM accept the observation Brightfield/ Darkfield/ Simple Polarized/ Nomarski DIC. Option : Auto Focus and Focus Navigation. Detail |
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| Focus Navigation System |
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| MM6-FN |
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| Focus navigation system achieves high-precisionheight measurement simply by focusing thevertical divergence of the index pattern. Detail |
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