| Thin Wafer Auto Loader |
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| AL Thin |
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| Safely transfer with the new design and efficiently inspect Ultra-Thin Wafers. Olympus succeeds in transfer of down to 90 micron thick wafer in 200mm diameter with full cassette. Detail |
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| Wafer Auto Loader |
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| AL110 |
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| This model is a wafer loader which contributes to improvement in yield and productivity of 200mm or smaller wafers. MX61(8")/MX51(6") combination maximize efficiency of wafer inspection. Detail |
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| Automatic Semiconductor Inspection Microscope (300mm) |
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| MX61A |
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| The MX61A has further advanced automation and motorization of microscopic observations with the wafer support up to 300 mm. The AF Function, newly developed multi-spot sensor has enabled a substantial increase Autofocus stability. Detail |
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| Semiconductor / FPD Inspection Microscope (300mm) |
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| MX61L |
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| The Clean Class 1 conformity, numerous features to exclude dust. All driving components are housed in a shielded structure and are made of materials that offer excellent abrasion resistance and conformity with Clean Class 1. MX61L is capable of accommodating up to 300 mm wafers. Detail |
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| Semiconductor/FPD Inspection Microscope (200mm) |
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| MX61 |
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| The Clean Class 1 conformity, numerous features to exclude dust. All driving components are housed in a shielded structure and are made of materials that offer excellent abrasion resistance and conformity with Clean Class 1. MX61 is capable of accommodating up to 200 mm wafers. Detail |
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